Programmable Spin Coater
WMSYSC-100A Programmable Spin Coater
- Product features
- Rotary motor adopts precision high speed servo motor specially designed for glue leveling machine, with high precision, high stability and high reliability.
- Excellent rotational acceleration performance, the maximum rotational acceleration * up to 20,000 RPM /s.
- Vacuum system adopts double lip seal, close to wrap the rotating shaft, the suction piece is firm, never drop the piece.
- Two security interlock functions:1 The homogenizing cavity has the detection function of opening and closing, which can be started only after the cavity is closed;2 The vacuum suction plate has the function of vacuum detection. In case of vacuum leakage, the operation will be stopped immediately to ensure the suction plate is firm.
3. The body shell is made of SUS304 stainless steel, the surface of nano titanium plating treatment, corrosion resistance, no rust, easy to clean.
4. The uniform cavity is made of German NPP material and processed by CNC. Receive and store the glue liquid separated from the substrate, avoid entering the vacuum pipeline and equipment inside. Corrosion resistant, easy to clean.
5. There are waste liquid discharge holes in the coating cavity of the homogenizer. In the process of coating, the waste liquid from the substrate is received and stored, and discharged from the drain hole.
6. The sample table is made of German NPP material and processed by CNC. High temperature resistance, corrosion resistance, no deformation.
7. Automatic segmenting process control. The whole process can be divided into 10 steps at most, and the acceleration time, rotation speed and gluing time of each step can be precisely controlled and continuously adjustable. Can store 30 groups of process procedures, call at any time.
8.7-inch LCD touch screen makes control more convenient; Real-time display of running status and parameters, more intuitive understanding of the process of dispensing;
9. The opening and closing of vacuum pump are controlled by automatic program, without manual operation.
10. Add the step of pre-suction before rotation, “pre-suction time” is 99s at most, ensure that the substrate is firmly adsorbed on the rotating table before rotation coating
Membrane. Add the desorption step after the homogenization is completed, and the “desorption time” is 99s at most. After the safe stop, cut off the vacuum and release the substrate to prevent the substrate from slipping and causing damage to the membrane.
Standard oil-free vacuum pump, low noise. Large suction will tightly adsorb the substrate on the rotating table to prevent flying.
Technical parameters
Model parameters
WMSYSC-100A Coating substrate size circular Ø5~100mm;square 5×5~70×70mm Rotation speed 0~8000rpm Speed resolution 1rpm Speed precision <0.02% Spin coating acceleration * 0~20000rpm/s Acceleration time per step 0~999.9s Rotation time per step 0~9999.9s Rotational time resolution 0.1s Presuction time 99s Desorption time 99s Cavity material Rawman leads NPP materials Sample stand material Rawman leads NPP materials Vacuum system sealing mode Double lip sealing device Type of drive motor Industrial grade precision high speed servo motor The built-in program 30 sets of built-in programs Rotation control mode Stepwise programming control Security and protection Chamber switch interlock and vacuum pressure detection protection Glue discharge channel Discharge hole at the bottom of cavity Vacuum pump switch mode Automatic program control Motor protection “WALL” structure system anti-glue liquid immersion motor
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