Programmable Spin Coater

Product features
Rotary motor adopts precision high speed servo motor specially designed for glue leveling machine, with high precision, high stability and high reliability.
Excellent rotational acceleration performance, the maximum rotational acceleration * up to 20,000 RPM /s.
Vacuum system adopts double lip seal, close to wrap the rotating shaft, the suction piece is firm, never drop the piece.

Two security interlock functions:1 The homogenizing cavity has the detection function of opening and closing, which can be started only after the cavity is closed;2 The vacuum suction plate has the function of vacuum detection. In case of vacuum leakage, the operation will be stopped immediately to ensure the suction plate is firm.

3. The body shell is made of SUS304 stainless steel, the surface of nano titanium plating treatment, corrosion resistance, no rust, easy to clean.

4. The uniform cavity is made of German NPP material and processed by CNC. Receive and store the glue liquid separated from the substrate, avoid entering the vacuum pipeline and equipment inside. Corrosion resistant, easy to clean.

5. There are waste liquid discharge holes in the coating cavity of the homogenizer. In the process of coating, the waste liquid from the substrate is received and stored, and discharged from the drain hole.

6. The sample table is made of German NPP material and processed by CNC. High temperature resistance, corrosion resistance, no deformation.

7. Automatic segmenting process control. The whole process can be divided into 10 steps at most, and the acceleration time, rotation speed and gluing time of each step can be precisely controlled and continuously adjustable. Can store 30 groups of process procedures, call at any time.

8.7-inch LCD touch screen makes control more convenient; Real-time display of running status and parameters, more intuitive understanding of the process of dispensing;

9. The opening and closing of vacuum pump are controlled by automatic program, without manual operation.

10. Add the step of pre-suction before rotation, “pre-suction time” is 99s at most, ensure that the substrate is firmly adsorbed on the rotating table before rotation coating

Membrane. Add the desorption step after the homogenization is completed, and the “desorption time” is 99s at most. After the safe stop, cut off the vacuum and release the substrate to prevent the substrate from slipping and causing damage to the membrane.

Standard oil-free vacuum pump, low noise. Large suction will tightly adsorb the substrate on the rotating table to prevent flying.

Technical parameters

Model parameters	WMSYSC-100A
Coating substrate size	circular Ø5~100mm；square 5×5~70×70mm
Rotation speed	0~8000rpm
Speed resolution	1rpm
Speed precision	＜0.02%
Spin coating acceleration *	0~20000rpm/s
Acceleration time per step	0~999.9s
Rotation time per step	0~9999.9s
Rotational time resolution	0.1s
Presuction time	99s
Desorption time	99s
Cavity material	Rawman leads NPP materials
Sample stand material	Rawman leads NPP materials

Vacuum system sealing mode	Double lip sealing device
Type of drive motor	Industrial grade precision high speed servo motor
The built-in program	30 sets of built-in programs
Rotation control mode	Stepwise programming control
Security and protection	Chamber switch interlock and vacuum pressure detection protection
Glue discharge channel	Discharge hole at the bottom of cavity
Vacuum pump switch mode	Automatic program control
Motor protection	“WALL” structure system anti-glue liquid immersion motor